发明公开
- 专利标题： METHOD FOR PRODUCING ZEOLITE MEMBRANE, GAS ADSORBENT, AND GAS ADSORPTION DEVICE
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申请号： EP22766953.8申请日： 2022-03-02
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公开(公告)号： EP4306675A1公开(公告)日： 2024-01-17
- 发明人: SATO, Eiji , SAKAMOTO, Hitoshi
- 申请人： Creative Coatings Co., Ltd.
- 申请人地址： JP Tokyo, 113-0023 2-28-12, Mukogaoka, Bunkyo-ku
- 代理机构： Wunderlich & Heim Patentanwälte Partnerschaftsgesellschaft mbB
- 优先权： JP2021036246 20210308
- 国际公布： WO2022190994 20220915
- 主分类号： C23C16/40
- IPC分类号： C23C16/40 ; B01D53/04 ; B01J20/18 ; B01J20/30 ; C01B39/02 ; C23C16/18 ; C23C16/455
摘要：
A method for forming a zeolite membrane by performing an ALD cycle, the ALD cycle including a silicon oxide film forming step and an aluminum oxide film forming step. In the silicon oxide film forming step, an organic Si compound is used as a first raw material gas and OH radicals are used as a reaction gas; in the aluminum oxide film forming step, an organic Al compound is used as a second raw material gas and OH radicals are used as a reaction gas; and the silicon oxide films and the aluminum oxide films are alternately formed in forward or reverse order to form the zeolite membrane.
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