- 专利标题: PIEZOELECTRIC ELEMENT AND ACTUATOR
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申请号: EP23199076.3申请日: 2023-09-22
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公开(公告)号: EP4346361A1公开(公告)日: 2024-04-03
- 发明人: NAKAMURA, Seigo , KOBAYASHI, Hiroyuki , SUGIMOTO, Shinya , SASAKI, Tsutomu
- 申请人: FUJIFILM Corporation
- 申请人地址: JP Tokyo 106-8620 26-30, Nishiazabu 2-chome Minato-ku
- 代理机构: HGF
- 优先权: JP2022158869 20220930
- 主分类号: H10N30/00
- IPC分类号: H10N30/00 ; H10N30/50 ; H10N30/853
摘要:
A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film contain a perovskite-type oxide containing Pb at an A site and containing Zr, Ti, and M at a B site as a main component, where M is a metal element selected from V, Nb, Ta, Sb, Mo, and W, an M composition ratio in the first piezoelectric film is different from an M composition ratio in the second piezoelectric film, and polarization-electric field hysteresis measured for the first piezoelectric film with the first electrode grounded and the second electrode as a drive electrode, and polarization-electric field hysteresis measured for the second piezoelectric film with the second electrode grounded and the third electrode as a drive electrode are shifted in the same electric field direction with respect to origins thereof.
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