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    PIEZOELECTRIC ELEMENT AND ACTUATOR
    4.
    发明公开
    PIEZOELECTRIC ELEMENT AND ACTUATOR 审中-实审

    公开(公告)号：EP4346361A1

    公开(公告)日：2024-04-03

    申请号：EP23199076.3

    申请日：2023-09-22

    申请人： FUJIFILM Corporation

    发明人： NAKAMURA, Seigo ,  KOBAYASHI, Hiroyuki ,  SUGIMOTO, Shinya ,  SASAKI, Tsutomu

    IPC分类号： H10N30/00 ,  H10N30/50 ,  H10N30/853

    摘要： A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film contain a perovskite-type oxide containing Pb at an A site and containing Zr, Ti, and M at a B site as a main component, where M is a metal element selected from V, Nb, Ta, Sb, Mo, and W, an M composition ratio in the first piezoelectric film is different from an M composition ratio in the second piezoelectric film, and polarization-electric field hysteresis measured for the first piezoelectric film with the first electrode grounded and the second electrode as a drive electrode, and polarization-electric field hysteresis measured for the second piezoelectric film with the second electrode grounded and the third electrode as a drive electrode are shifted in the same electric field direction with respect to origins thereof.