- 专利标题: MICROELECTROMECHANICAL GYROSCOPE WITH DETECTION OF ANGULAR VELOCITY ALONG A VERTICAL AXIS
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申请号: EP23202344.0申请日: 2023-10-09
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公开(公告)号: EP4361560A1公开(公告)日: 2024-05-01
- 发明人: CARULLI, Paola , FALORNI, Luca Giuseppe , FEDELI, Patrick , GUERINONI, Luca
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 代理机构: Studio Torta S.p.A.
- 优先权: IT 202200022377 2022.10.31
- 主分类号: G01C19/5762
- IPC分类号: G01C19/5762 ; G01C19/5747
摘要:
A microelectromechanical gyroscope (10) with detection along a vertical axis is provided with a detection structure (10) having a movable structure (12), suspended above a substrate (13) so as to perform, as a function of an angular velocity (Ωz) around the vertical axis a sense movement along a first horizontal axis (x). The movable structure has at least one drive mass (14) internally defining a window (16), elastically coupled to a rotor anchor (20'), at an anchoring region (A), through elastic anchoring elements (21); at least one bridge element (18), rigid and of a conductive material, cantilevered suspended and extending within the window along the first horizontal axis, elastically coupled to the drive mass; movable electrodes (23), carried integrally by the bridge element with extension along a second horizontal axis (y). The detection structure (10) also has stator electrodes (28, 29), arranged in the window and interdigitated with the movable electrodes, at a certain separation distance below the bridge element (18), which extends longitudinally above the same stator electrodes and the movable electrodes.
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