- 专利标题: MICROELECTROMECHANICAL DEVICE WITH TEST STRUCTURE, TEST EQUIPMENT FOR TESTING MICROELECTROMECHANICAL DEVICES AND METHOD FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE
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申请号: EP23211935.4申请日: 2023-11-24
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公开(公告)号: EP4379320A1公开(公告)日: 2024-06-05
- 发明人: GUERINONI, Luca , FEDELI, Patrick , FALORNI, Luca Giuseppe
- 申请人: STMicroelectronics S.r.l.
- 申请人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT 20864 Agrate Brianza (MB) Via C. Olivetti, 2
- 代理机构: Studio Torta S.p.A.
- 优先权: IT 202200024732 2022.11.30
- 主分类号: G01C19/5719
- IPC分类号: G01C19/5719 ; G01C19/5733
摘要:
A microelectromechanical device includes: a support body (8, 10-13); at least one movable mass (15) of semiconductor material, elastically constrained to the support body (8, 10-13) so as to be able to oscillate; fixed detection electrodes (22, 23) rigidly connected to the support body (8, 10-13) and capacitively coupled to the at least one movable mass (15); and at least one test structure (17) of semiconductor material, rigidly connected to the support body (8, 10-13) and distinct from the fixed detection electrodes (22, 23). The test structure (17) is capacitively coupled to the at least one movable mass (15) and is configured to apply electrostatic forces (FX, FY, FZ) to the at least one movable mass (15) in response to a voltage between the test structure (17) and the at least one movable mass (15).
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