- 专利标题: DEVICE WITH WORKFUNCTION METAL IN DRIFT REGION
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申请号: EP24152278.8申请日: 2024-01-17
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公开(公告)号: EP4421873A1公开(公告)日: 2024-08-28
- 发明人: PANDEY, Shesh Mani , KRISHNASAMY, Rajendran , TAN, Chung Foong
- 申请人: GlobalFoundries U.S. Inc.
- 申请人地址: US Malta, NY 12020 400 Stonebreak Road Extension
- 专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人: GlobalFoundries U.S. Inc.
- 当前专利权人地址: US Malta, NY 12020 400 Stonebreak Road Extension
- 代理机构: Lambacher, Michael
- 优先权: US 2318111995 2023.02.21
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/49 ; H01L29/78 ; H01L21/336 ; H01L29/40
摘要:
The present disclosure relates to semiconductor structures and, more particularly, to a device with workfunction metal in a drift region and methods of manufacture. The structure includes: a gate structure having at least a first workfunction metal in a channel region and a second workfunction metal, which is different from the first workfunction metal, in a trench in a drift region; and a sidewall spacer adjacent to the gate structure within the trench in the drift region.
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