- 专利标题: POLYCRYSTALLINE SIC MOLDED BODY AND METHOD FOR MANUFACTURING SAME
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申请号: EP22886552.3申请日: 2022-09-26
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公开(公告)号: EP4424870A1公开(公告)日: 2024-09-04
- 发明人: HARADA, Yohei , OISHI, Junya
- 申请人: Tokai Carbon Co., Ltd.
- 申请人地址: JP Minato-ku Tokyo 107-8636 2-3 Kita-Aoyama 1-chome
- 专利权人: Tokai Carbon Co., Ltd.
- 当前专利权人: Tokai Carbon Co., Ltd.
- 当前专利权人地址: JP Minato-ku Tokyo 107-8636 2-3 Kita-Aoyama 1-chome
- 代理机构: Eisenführ Speiser
- 优先权: JP 21176755 2021.10.28
- 国际申请: JP2022035725 2022.09.26
- 国际公布: WO2023074219 2023.05.04
- 主分类号: C23F4/00
- IPC分类号: C23F4/00 ; C04B41/87 ; C01B32/977 ; C30B29/36 ; C23C16/42 ; H01L21/3065
摘要:
Provided are a polycrystalline SiC compact capable of achieving uniform plasma etching when used as electrodes and a method for manufacturing the same. A polycrystalline SiC compact has a major surface in which Wa (0 to 10 mm) is 0.00 to 0.05 µm or less, Wa (10 to 20 mm) is 0.13 µm or less, and Wa (20 to 30 mm) is 0.20 µm or less.
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