发明公开
- 专利标题: SEMICONDUCTOR ELEMENT
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申请号: EP22898176.7申请日: 2022-08-10
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公开(公告)号: EP4443520A1公开(公告)日: 2024-10-09
- 发明人: ASAI Mitsuo
- 申请人: Kao Corporation
- 申请人地址: JP Tokyo 103-8210 14-10, Nihonbashi Kayabacho 1-chome Chuo-ku
- 专利权人: Kao Corporation
- 当前专利权人: Kao Corporation
- 当前专利权人地址: JP Tokyo 103-8210 14-10, Nihonbashi Kayabacho 1-chome Chuo-ku
- 代理机构: Hoffmann Eitle
- 优先权: JP 21193569 2021.11.29
- 国际申请: JP2022030645 2022.08.10
- 国际公布: WO2023095391 2023.06.01
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L21/336 ; H01L29/16 ; H10K10/00 ; H10K85/00
摘要:
The present disclosure relates to a semiconductor element 1 including: a gate electrode 2; a source electrode 3; a drain electrode 4; a semiconductor layer 5 that is in contact with the source electrode 3 and the drain electrode 4; and a gate insulating layer 6 that insulates the semiconductor layer 5 from the gate electrode 2, in which the semiconductor layer 5 has a network structure of carbon nanotubes, the semiconductor layer 5 is sealed with a sealing layer 8, and the semiconductor layer 5 has an average thickness of 5 nm or less. The sealing layer 8 preferably contains a compound whose SP value calculated using the Fedors method is 15 (cal/cm3)1/2 or less. Also, the sealing layer preferably has a relative permittivity of 5.0 or less. The sealing layer 8 preferably contains one or more selected from the group consisting of a fluorine-based resin, an acrylic resin, a styrene-based resin, a vinyl-based resin, and an olefin-based resin.
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