发明公开
- 专利标题： INTRINSIC PARAMETER TESTING
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申请号： EP24164319.6申请日： 2024-03-18
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公开(公告)号： EP4456532A1公开(公告)日： 2024-10-30
- 发明人: THOMAS, John
- 申请人： ASMPT AEi, Inc.
- 申请人地址： US Billerica, Massachusetts 01862 101 Billerica Avenue / Building 4
- 代理机构： Emerson, Peter James
- 优先权： US202318137661 20230421
- 主分类号： H04N17/00
- IPC分类号： H04N17/00 ; G06T7/80
摘要：
Intrinsic parameter testing apparatus and methodology, which may variously shorten process time by using a plurality of collimators capable of azimuthal rotation, and address chromatic aberration by providing independently actuable illumination means associated with the or each collimator, for selectively supplying light of various wavelength ranges.
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