发明专利
- 专利标题： Exposure device
- 专利标题（中）： 曝光装置
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申请号： JP2009200653申请日： 2009-08-31
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公开(公告)号： JP2011003866A公开(公告)日： 2011-01-06
- 发明人: JIN YONG HYUN , KIM YOUNG TAE , YOON GUN JUNG , KIM JI SOOK , LEE GI WOO
- 申请人： Samsung Electro-Mechanics Co Ltd , 三星電機株式会社
- 专利权人： Samsung Electro-Mechanics Co Ltd,三星電機株式会社
- 当前专利权人： Samsung Electro-Mechanics Co Ltd,三星電機株式会社
- 优先权： KR20090055070 2009-06-19
- 主分类号： H01L21/027
- IPC分类号： H01L21/027 ; G03F7/20
摘要：
PROBLEM TO BE SOLVED: To provide an exposure device for reducing a calorific value and the influence of diffraction of light.SOLUTION: The exposure device 100 used for drawing a circuit on a semiconductor wafer and a TFTLCD substrate includes a casing 110; a plurality of LEDs 120 housed in the casing 110 and straightly radiating light within an UV wavelength range from upper cover 111 made up of transparent member to the outside; and a power source impressing part 110 for supplying electric supply to be applied to the LED 120.
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