发明专利
- 专利标题: Deformed silica sol
- 专利标题(中): 变形硅胶
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申请号: JP2012203722申请日: 2012-09-15
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公开(公告)号: JP2013032276A公开(公告)日: 2013-02-14
- 发明人: NAKAYAMA KAZUHIRO , NAKAJIMA AKIRA , NISHIDA HIROYASU , WAKAMIYA YOSHINORI
- 申请人: Jgc Catalysts & Chemicals Ltd , 日揮触媒化成株式会社
- 专利权人: Jgc Catalysts & Chemicals Ltd,日揮触媒化成株式会社
- 当前专利权人: Jgc Catalysts & Chemicals Ltd,日揮触媒化成株式会社
- 优先权: JP2005231465 2005-08-10; JP2005254054 2005-09-01
- 主分类号: C01B33/141
- IPC分类号: C01B33/141 ; B24B37/00 ; H01L21/304
摘要:
PROBLEM TO BE SOLVED: To provide a deformed silica sol suitable as abrasive materials such as an abrasive material for CMP and the like.SOLUTION: In the deformed silica sol, the ratio (r/r', hereinafter called the "association ratio") of the average particle diameter (r) measured by a dynamic light scattering method to the equivalent sphere conversion particle diameter (r') calculated from the average specific surface area measured by a nitrogen adsorption method is within the range of 1.2-10, the equivalent sphere conversion particle diameter (r') is within the range of 5-200 nm, the specific surface area is within the range of 13-550 m/g, fine deformed silica particles having uneven shapes are dispersed in a solvent and the ratios of Ca and Mg (in terms of oxides) contained in the fine deformed silica particles to SiOare 1,000 ppm or less respectively.
公开/授权文献
- JP5599440B2 Irregular silica sol 公开/授权日:2014-10-01
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