本公开提供一种系统，用于显示图像，方法和装置。 一些这样的设备包括耦合到所述衬底，悬浮显示元件阵列和（EAL）过高设开口层显示元件的阵列。 EAL是耦合到所述衬底，对于每个显示元件，包括用于允许光通过的至少一个开口。 用于制造这样的装置的方法包括：形成穿过所述EAL的蚀刻孔的步骤，至少部分地使用的步骤升华牺牲类型，包括：使用一个两相释放过程的步骤中，牺牲 作为部分保持围绕装置的一部分，包括释放所述装置的步骤中的至少一个。

The present disclosure provides a system for displaying an image, method, and apparatus. Some such devices include an array of display element coupled to the substrate, high 設開 opening layer which is suspended over the array of display elements and a (EAL). EAL is coupled to the substrate, for each of the display elements, comprising at least one opening for allowing passage of light. The method for producing such a device includes the steps of forming an etching hole penetrating the EAL, a step of using at least partly sublimable sacrificial of the steps of using a biphasic release process, the sacrificial as part remains surrounds a part of the apparatus, comprises at least one of the step of releasing the device.