对于在检查仪，氟，氟离子，和机械使用的非线性光学晶体的钝化和在含氟化合物中的至少一种的存在下生长的非线性光学晶体，所述非线性光学晶体 包括来制备，并在非线性光学晶体进行退火处理，和一个或含氘含氢钝化气体中暴露所述非线性光学晶体。

Passivation of the nonlinear optical crystal for use in the inspection instrument, fluorine, fluoride ions, and mechanical and growing the non-linear optical crystal in the presence of at least one among the fluoride-containing compound, a nonlinear optical crystal includes be prepared, and performing the annealing process in a nonlinear optical crystal, and exposing the non-linear optical crystal in a hydrogen-containing or deuterium-containing passivating gas.