- 专利标题: Calcium fluoride (CaF2) stress plate and a method for making the same
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申请号: JP2001550056申请日: 2000-12-21
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公开(公告)号: JP4210058B2公开(公告)日: 2009-01-14
- 发明人: ジーン ジャイ マーティン,
- 申请人: エーエスエムエル ホールディング エヌ.ブイ.
- 专利权人: エーエスエムエル ホールディング エヌ.ブイ.
- 当前专利权人: エーエスエムエル ホールディング エヌ.ブイ.
- 优先权: US47148499 1999-12-23
- 主分类号: G02B5/30
- IPC分类号: G02B5/30 ; C30B33/00 ; G02B1/02 ; G02F1/01 ; G03F7/20 ; H01L21/027
摘要:
A calcium fluoride (CaF2) stress plate provides a predetermined amount of optical delay. The CaF2 stress plate has surfaces that lie in CaF2 cubic planes, and delays an optical wavefront that is incident to a set of cubic planes along a transmission axis. To implement the desired delay, the CaF2 stress plate has a first index of refraction that is seen by a first field component of the optical wavefront, and a second index of refraction that is seen by a second field component of the optical wavefront. The optical delay of the stress plate is proportional to the differences between the two indexes of refraction. Embodiments of the invention include a method of fabricating the CaF2 stress plate from a sample of CaF2 material. The method includes the step of determining the orientation of the cubic planes for the CaF2 sample, as the sample is typically oriented along the cleave planes. Next, the sample is processed to generate a CaF2 plate whose surfaces are oriented in CaF2 cubic planes. Next, a compressive or tensile force is applied perpendicular to at least one pair of cubic plane surfaces and perpendicular to the transmission axis for the incident optical wavefront. The compressive/tensile force has the effect of changing the index of refraction for electromagnetic fields that are oriented along the direction of the force vector from the characteristic index of refraction for CaF2. After which, the CaF2 stress plate effectively has two indexes of refraction, where the amount optical delay is proportional to the difference between the indexes of refraction. Next, the amount of optical delay is measured to determine if the measured delay is sufficiently close to the specified delay. If it is not, then more compression or stress can be applied until the desired delay is achieved. In alternate embodiment, shear forces are applied to the CaF2 plate instead of compressive or tensile forces. The shear forces are applied along mechanical surfaces that are rotated 45 degrees to the CaF cubic planes of the plate. As with the compressive/tensile forces, the shear forces operate to change the index of refraction of the CaF2 plate in the direction of a resultant force vector.
公开/授权文献
- JP2003519401A 公开/授权日:2003-06-17
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