Invention Patent
- Patent Title: Photodiode array, a method of manufacturing the same, and the radiation detector
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Application No.: JP2004530546Application Date: 2003-08-07
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Publication No.: JP4455996B2Publication Date: 2010-04-21
- Inventor: 勝己 柴山
- Applicant: 浜松ホトニクス株式会社
- Assignee: 浜松ホトニクス株式会社
- Current Assignee: 浜松ホトニクス株式会社
- Priority: JP2002233562 2002-08-09; JP2003015318 2003-01-23
- Main IPC: H01L27/146
- IPC: H01L27/146 ; G01T1/20 ; G01T1/24 ; H01L27/14 ; H01L27/144 ; H01L31/0236 ; H01L31/09 ; H01L31/103 ; H04N5/32 ; H04N5/321 ; H04N5/335 ; H04N5/369
Public/Granted literature
- JPWO2004019411A1 フォトダイオードアレイ、その製造方法、及び放射線検出器 Public/Granted day:2005-12-15
Information query
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