Invention Patent
- Patent Title: Substrate manufacturing method and a substrate manufacturing apparatus
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Application No.: JP2007229424Application Date: 2007-09-04
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Publication No.: JP4974818B2Publication Date: 2012-07-11
- Inventor: 秀明 坂口 , 光敏 東 , 和男 田中 , 清明 飯田
- Applicant: 新光電気工業株式会社
- Assignee: 新光電気工業株式会社
- Current Assignee: 新光電気工業株式会社
- Priority: JP2007137940 2007-05-24
- Main IPC: H05K3/34
- IPC: H05K3/34 ; B23K3/06 ; H01L23/12 ; H05K3/00
Public/Granted literature
- JP2009004724A Substrate manufacturing method and apparatus Public/Granted day:2009-01-08
Information query
