Method of manufacturing a production method and a semiconductor package of the wiring substrate

    公开(公告)号:JP5372112B2

    公开(公告)日:2013-12-18

    申请号:JP2011241947

    申请日:2011-11-04

    Abstract: PROBLEM TO BE SOLVED: To provide a wiring board manufacturing method and a semiconductor package manufacturing method which can reduce displacement of a pitch of an electrode pad electrically connected with a semiconductor chip from an intended pitch. SOLUTION: A wiring board manufacturing method comprises the steps of forming a metal layer 14 on a top face of a support substrate 11 having a thermal expansion coefficient equal to that of a semiconductor substrate, forming a release layer 15 on the metal layer 14, forming a first insulation layer 16 on the release layer 15, forming a through hole 16x penetrating the release layer 15 and the first insulation layer 16 so as to expose the metal layer 14 at a position corresponding to a position on which a first wiring layer 17 is to be formed, forming the first wiring layer 17 on the metal layer 14 at the position exposed inside the through hole 16x using the metal layer 14 as a seed layer, further laminating wiring layers 20, 23, 26 and insulation layers 21, 24 on the first wiring layer 17 and the first insulation layer 16, and removing the support substrate 11 by performing predetermined processing on the release layer 15. COPYRIGHT: (C)2012,JPO&INPIT

    Conductive ball mounting apparatus

    公开(公告)号:JP5312892B2

    公开(公告)日:2013-10-09

    申请号:JP2008261000

    申请日:2008-10-07

    Abstract: PROBLEM TO BE SOLVED: To provide a conductive ball mounting apparatus which shortens a processing time required for steps to mount conductive balls on a plurality of pads and to remove excessive conductive balls, improves productivity, and accurately mounts the conductive balls on the pads. SOLUTION: A housing stage 82 is provided to house a vibrator 12 and a conductive ball container 13, and it is provided with a plate 81 having a penetrated section 81A to discharge a conductive ball 14 to an adhesive material 38 formed on a pad 35. COPYRIGHT: (C)2009,JPO&INPIT

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