Invention Patent
- Patent Title: The formation of the single crystal semiconductor nanowire
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Application No.: JP2009149550Application Date: 2009-06-24
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Publication No.: JP5475339B2Publication Date: 2014-04-16
- Inventor: フィリッペ・エム・フェレーケン
- Applicant: アイメックImec
- Assignee: アイメックImec
- Current Assignee: アイメックＩｍｅｃ
- Priority: US7514108 2008-06-24
- Main IPC: C30B29/62
- IPC: C30B29/62 ; B82B3/00 ; C23C26/00 ; C30B1/02 ; C30B33/08
Public/Granted literature
- JP2010064951A Formation of single crystal semiconductor nanowire Public/Granted day:2010-03-25
Information query
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