发明授权
KR100757108B1 반도체 소자의 미세 패턴을 형성하기 위한 하드마스크용고분자 및 이를 함유하는 하드마스크용 조성물
失效 - Ended
用于HARDMASK和HARDMASK组合物的聚合物
- 专利标题: 반도체 소자의 미세 패턴을 형성하기 위한 하드마스크용고분자 및 이를 함유하는 하드마스크용 조성물
- 专利标题(英): Polymer for hardmask and hardmask composition containing thereof
- 专利标题(中): 用于HARDMASK和HARDMASK组合物的聚合物
-
申请号: KR1020050114280申请日: 2005-11-28
-
公开(公告)号: KR100757108B1公开(公告)日: 2007-10-08
- 发明人: 정혜전
- 申请人: 씨티엔지니어링주식회사 , 류흥기 , 남도마
- 申请人地址: 경기도 평택시 세교산단로***번길 **, 평택공단*-*블럭 (세교동)
- 专利权人: 씨티엔지니어링주식회사,류흥기,남도마
- 当前专利权人: 씨티엔지니어링주식회사,류흥기,남도마
- 当前专利权人地址: 경기도 평택시 세교산단로***번길 **, 평택공단*-*블럭 (세교동)
- 代理商 권오식; 김종관; 박창희
- 主分类号: C08G73/10
- IPC分类号: C08G73/10 ; C08G59/52
摘要:
A hardmask polymer for a semiconductor device and a hardmask composition comprising the same are provided to form micropatterns of the semiconductor without any deformation of patterns by using a polyamic acid with excellent heat-resistance. A hardmask composition for forming micropatterns of a semiconductor device comprises a polyamic acid represented by the formula 1 or the formula 2 as a hardmask polymer. The composition further comprises a melamine-based cross-linking agent in an amount of 1-10 wt%, a thermal acid generator in an amount of 1-10 wt% and an organic solvent in a weight ratio of 2-80 times, based on the polyamic acid. Preferably, the melamine-based cross-linking agent is 2,4,6-tris(dimethoxymethylamino)-1,3,5-triazine, the thermal acid generator is 2-hydroxycyclohexylparatoluenylsulfonate and the organic solvent comprises at least one selected from gamma-butyrolactone, cyclohexanone and a mixture thereof.
信息查询