This application is directed to the production method of the patterned substrate. The method includes, for example, a manufacturing process or for other uses of the device, such as electronic devices and integrated circuits, such as the manufacture of integrated optical systems, guidance and detection patterns for magnetic domain memories, guidance and detection patterns, flat-panel displays, liquid-crystal displays (LCD), thin film magnetic heads or may be applied to the manufacture of organic light emitting diode, an integrated circuit, the bit-pattern on the surface for use in the preparation of individual track medium (discrete track medium) such as a magnetic storage device, such as a patterned medium, and / or hard drive, to be used for building.