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发明专利
TW201515027A 熱敏電阻用金屬氮化物材料及其製造方法及薄膜型熱敏電阻感測器 审中-公开
热敏电阻用金属氮化物材料及其制造方法及薄膜型热敏电阻传感器

熱敏電阻用金屬氮化物材料及其製造方法及薄膜型熱敏電阻感測器
摘要：
一種用於熱敏電阻之金屬氮化物材料，由通式：Mx(Al1-vSiv)y(N1-wOw)z(惟，M表示Ti、V、Cr、Mn、Fe及Co之至少1種；0.0
摘要（中）：

一种用于热敏电阻之金属氮化物材料，由通式：Mx(Al1-vSiv)y(N1-wOw)z(惟，M表示Ti、V、Cr、Mn、Fe及Co之至少1种；0.0

摘要（英）：

The present invention is a metal nitride material used for a thermistor, comprising a metal nitride represented by the general formula: Mx(Al1-vSiv)y(N1-wOw)z (wherein M represents at least one of Ti, V, Cr, Mn, Fe, and Co; 0.0 < v < 0.3; 0.70 ≤ y/(x+y) ≤ 0.98; 0.45 ≤ z ≤ 0.55; 0 < w ≤ 0.35; and x + y + z = 1), such that the crystal structure of the same is a single phase of hexagonal wurtzite-type. A manufacturing method for this metal nitride material for a thermistor comprises a deposition step which forms a film by performing reactive sputtering within a nitrogen- and oxygen-containing atmosphere using a M-Al-Si alloy sputtering target (wherein M represents at least one of Ti, V, Cr, Mn, Fe, and Co).

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