本揭露之一些实施例提供一种在一物联网(IOT)中之气体传感器。该气体传感器包含一基板、经放置于该基板上方之一导体，及经放置于该导体上方之一传感膜。该导体具有：一俯视图图案，其包含复数个开口，该开口之一最小尺寸小于约4微米；及一周边，其密封该开口。本揭露之一些实施例提供一种制造一气体传感器之方法。该方法包含：接收一基板；于该基板上方形成一导体；图案化该导体以借由一蚀刻操作于该导体中形成复数个开口；及于该导体上方形成一气体传感膜。该等开口系以一重复图案配置，且该开口之一最小尺寸系约4微米。

Some embodiments of the present disclosure provide a gas sensor in an IOT. The gas sensor includes a substrate, a conductor disposed above the substrate, and a sensing film disposed over the conductor. The conductor has a top-view pattern including a plurality of openings, a minimal dimension of the opening being less than about 4 micrometer; and a perimeter enclosing the opening. Some embodiments of the present disclosure provide a method of manufacturing a gas sensor. The method includes receiving a substrate; forming a conductor, over the substrate; patterning the conductor to form a plurality of openings in the conductor by an etching operation, and forming a gas-sensing film over the conductor. The openings are arranged in a repeating pattern, and a minimal dimension of the opening being about 4 micrometer.