Invention Grant
- Patent Title: Bottle change apparatus, substrate treatment apparatus, bottle change method, bottle cap, bottle cap change apparatus and bottle cap change method
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Application No.: US14340680Application Date: 2014-07-25
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Publication No.: US10000331B2Publication Date: 2018-06-19
- Inventor: Arnaud Alain Jean Dauendorffer , Shinobu Miyazaki
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2013-164812 20130808; JP2013-164813 20130808
- Main IPC: B67D7/02
- IPC: B67D7/02 ; B65D83/40 ; B65D47/04 ; B05C11/11 ; B05C11/10 ; B65D83/32

Abstract:
A bottle change apparatus includes a change mechanism that changes a bottle, and the bottle includes a bottle cap. The bottle cap includes: a treatment solution straw part that forms a treatment solution flow passage for supplying a treatment solution in the bottle to an outside of the bottle and extends to an inside of the bottle; and a treatment solution connecting part that is provided at an end portion outside the bottle of the treatment solution straw part. The change mechanism includes: a connection mechanism part including a treatment solution pipe which is connected to the treatment solution connecting part of the bottle and through which the treatment solution supplied from the bottle flows; and a bottle mounting part that transfers the bottle to a connection position where the treatment solution connecting part and the treatment solution pipe are connected together.
Public/Granted literature
Information query
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