Invention Grant
- Patent Title: MEMS structural component including a deflectable diaphragm and a fixed counter-element as well as a method for manufacturing it
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Application No.: US14314624Application Date: 2014-06-25
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Publication No.: US10011479B2Publication Date: 2018-07-03
- Inventor: Christoph Schelling , Yvonne Bergmann , Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102013212173 20130626
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00

Abstract:
For simplifying the manufacture of a MEMS structural component including a deflectable diaphragm which spans an opening in the rear side of the structural component, and including a fixed counter-element, which is provided with passage openings, the counter-element from the base substrate of the MEMS structural component is patterned and the deflectable diaphragm is implemented in a layered structure on the base substrate. These measures are intended to improve the diaphragm properties and reduce the overall height of the MEMS structural component.
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