Invention Grant
- Patent Title: Thin film transistor, thin film transistor substrate, display apparatus and method of manufacturing thin film transistor
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Application No.: US14478273Application Date: 2014-09-05
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Publication No.: US10014172B2Publication Date: 2018-07-03
- Inventor: Byung-Du Ahn , Tae-Young Kim , Yeon-Gon Mo
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Lee & Morse P.C.
- Priority: KR10-2014-0026808 20140306
- Main IPC: H01L21/02
- IPC: H01L21/02 ; G02F1/1368 ; H01L29/66 ; H01L29/786 ; H01L27/12 ; H01L27/32

Abstract:
A thin film transistor including a gate electrode; an active layer insulated from the gate electrode; a source electrode and a drain electrode that are insulated from the gate electrode and are electrically connected to the active layer; a first etch stopper layer that is formed of an insulation material and contacts a portion of the active layer located between areas of the active layer that are electrically connected to the source electrode and the drain electrode; a second etch stopper layer on the first etch stopper layer, the second etch stopper layer being formed of an insulation material of a same type as the insulation material used to form the first etch stopper layer, the second etch stopper layer having a higher density than the first etch stopper layer; and a third etch stopper layer on the second etch stopper layer.
Public/Granted literature
Information query
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