Invention Grant
- Patent Title: Method for patterning a thin film
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Application No.: US15523742Application Date: 2015-11-09
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Publication No.: US10014183B2Publication Date: 2018-07-03
- Inventor: Shay Reboh , Laurent Grenouillet , Yves Morand
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , STMICROELECTRONICS SA
- Applicant Address: FR Paris FR Montrouge
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS SA
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS SA
- Current Assignee Address: FR Paris FR Montrouge
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1460849 20141110
- International Application: PCT/EP2015/076078 WO 20151109
- International Announcement: WO2016/075083 WO 20160519
- Main IPC: H01L21/308
- IPC: H01L21/308 ; H01L21/311 ; H01L27/12

Abstract:
A method for producing at least one pattern in a layer resting on a substrate, including: a) making amorphous at least one first block of an upper layer of crystalline material resting on a first amorphous supporting layer, while the crystalline structure of a second block of the upper layer that adjoins and is juxtaposed with the first block is preserved; b) partially recrystallizing the first block by using at least one side surface of the second block that is in contact with the first block as an area for the start of a recrystallization front, the partial recrystallization being carried out to preserve a region of amorphous material in the first block; c) selectively etching the amorphous material of the upper layer with respect to the crystalline material of the upper layer to form at least one first pattern in the upper layer.
Public/Granted literature
- US20170358459A1 METHOD FOR PATTERNING A THIN FILM Public/Granted day:2017-12-14
Information query
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