Invention Grant
- Patent Title: Devices with contact-to-gate shorting through conductive paths between fins and fabrication methods
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Application No.: US15248889Application Date: 2016-08-26
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Publication No.: US10014303B2Publication Date: 2018-07-03
- Inventor: Hui Zang , Min-hwa Chi
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Jacquelyn A. Graff
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/11 ; H01L21/311 ; H01L21/768 ; H01L29/78 ; H01L23/535

Abstract:
Semiconductor devices and methods of fabricating the semiconductor devices for forming conductive paths between fins for contact-to-gate shorting. One method includes, for instance: obtaining wafer with a substrate, at least one fin, at least one hard mask, and an oxide layer; etching the oxide layer to reveal at least one of a portion of the hard masks; forming sacrificial pillars over the substrate; forming sacrificial gates, wherein at least one sacrificial gate contacts at least one sacrificial pillar; growing an epitaxial layer between the at least one sacrificial gate and the at least one sacrificial pillar; starting a RMG process on the sacrificial gates; etching to remove the sacrificial pillars and form pillar openings; and completing the RMG process to fill the pillar openings and the gate openings with a metal.
Public/Granted literature
- US20180061842A1 DEVICES WITH CONTACT-TO-GATE SHORTING THROUGH CONDUCTIVE PATHS BETWEEN FINS AND FABRICATION METHODS Public/Granted day:2018-03-01
Information query
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