- 专利标题： Guide pattern data correcting method, pattern forming method, and computer readable record medium
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申请号： US15377472申请日： 2016-12-13
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公开(公告)号： US10019547B2公开(公告)日： 2018-07-10
- 发明人: Hiroki Yonemitsu
- 申请人： TOSHIBA MEMORY CORPORATION
- 申请人地址： JP Tokyo
- 专利权人： Toshiba Memory Corporation
- 当前专利权人： Toshiba Memory Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权： JP2013-29071 20130218
- 主分类号： G06F17/50
- IPC分类号： G06F17/50 ; G03F7/40 ; G03F7/38 ; B81C1/00 ; G03F7/00 ; B82Y40/00
摘要：
According to one embodiment, a guide pattern data correcting method is for correcting guide pattern data of a physical guide for formation of a polymer material to be microphase-separated. The physical guide has a plurality of concave portions in the guide pattern data, and at least two concave portions out of the plurality of concave portions are connected to each other. The guide pattern data is subjected to correction by shifting or rotation of at least either of the two connected concave portions.
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