A short-resistant CSP includes an isolation layer, an electrically conductive RDL, and an insulating layer. The electrically conductive RDL is on the isolation layer and includes a first and a second RDL segment. The insulating layer includes a first insulator portion between the isolation layer and the first RDL segment to improve electrical isolation between the first and second RDL segments. A method for preventing short-circuiting between conductors of CSP includes (1) depositing a first insulating layer on a first substrate region, (2) depositing a RDL segment on the substrate above the first substrate region, at least a portion of the first insulating layer being between the first RDL segment and the first substrate region, and (3) depositing a second RDL segment on the substrate above a second substrate region, such that the first insulating layer interrupts a leakage current path between the first and second RDL segments.