Invention Grant
- Patent Title: Laterally diffused metal-oxide-semiconductor transistor and manufacturing method thereof
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Application No.: US14886108Application Date: 2015-10-19
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Publication No.: US10020393B2Publication Date: 2018-07-10
- Inventor: Shih-Yin Hsiao , Chia-Min Hung
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN201510593413 20150917
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/24 ; H01L29/06 ; H01L29/417 ; H01L29/66 ; H01L21/4763 ; H01L21/471 ; H01L21/4757 ; H01L21/441

Abstract:
The present invention provides a laterally diffused metal-oxide-semiconductor (LDMOS) transistor and a manufacturing method thereof. The LDMOS transistor includes a semiconductor substrate, an insulation structure, agate structure, and a plurality of floating electrodes. The insulation structure is disposed in the semiconductor substrate. The gate structure is disposed on the semiconductor substrate. The floating electrodes are embedded in the insulation structure, wherein the floating electrode closest to the gate structure protrudes from a top surface of the insulation structure or the gate structure includes at least one branch portion embedded in the insulation structure, and the floating electrodes are separated from the gate structure.
Public/Granted literature
- US20170084739A1 LATERALLY DIFFUSED METAL-OXIDE-SEMICONDUCTOR TRANSISTOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2017-03-23
Information query
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