Invention Grant
- Patent Title: Semiconductor device with gate inside U-shaped channel and methods of making such a device
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Application No.: US14853012Application Date: 2015-09-14
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Publication No.: US10020395B2Publication Date: 2018-07-10
- Inventor: Bartlomiej Jan Pawlak
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/02 ; H01L29/423 ; H01L21/336

Abstract:
One illustrative method disclosed herein includes, among other things, forming a trench in a semiconductor substrate, forming a liner semiconductor material above the entire interior surface of the trench, the liner semiconductor material defining a transistor cavity, forming a gate structure that is at least partially positioned within the transistor cavity, and performing at least one epitaxial deposition process to form a source region structure and a drain region structure on opposite sides of the gate structure, wherein at least a portion of each of the source region structure and the drain region structure is positioned within the transistor cavity.
Public/Granted literature
- US20170077297A1 SEMICONDUCTOR DEVICE WITH GATE INSIDE U-SHAPED CHANNEL AND METHODS OF MAKING SUCH A DEVICE Public/Granted day:2017-03-16
Information query
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