Invention Grant
- Patent Title: Gold evaporative sources with reduced contaminants and methods for making the same
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Application No.: US15715892Application Date: 2017-09-26
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Publication No.: US10023939B2Publication Date: 2018-07-17
- Inventor: Wendell R. Stuber , Ernesto Aviles , Jaydeep Sarkar , Paul S. Gilman
- Applicant: PRAXAIR S.T. TECHNOLOGY, INC.
- Applicant Address: US CT North Haven
- Assignee: PRAXAIR S.T. TECHNOLOGY, INC.
- Current Assignee: PRAXAIR S.T. TECHNOLOGY, INC.
- Current Assignee Address: US CT North Haven
- Agent Nilay S. Dalal
- Main IPC: C22C5/02
- IPC: C22C5/02 ; B08B3/08 ; C23C14/14 ; C22B9/14 ; C23C14/56 ; B21C1/00 ; B24B31/06 ; C23G1/10 ; B21C47/02 ; C22B3/00 ; C23C14/24 ; B08B3/10 ; B08B3/12 ; B24B39/00

Abstract:
A unique sequence of steps is provided to reduce contaminants along one or more surfaces and faces of gold evaporative sources without deleteriously impacting the structure of the gold evaporative sources. Edges are deburred; contaminants are successfully removed therealong; and surface smoothness is substantially retained. The resultant gold evaporative source is suitable for use in evaporative processes as a precursor to gold film deposition without the occurrence or a substantial reduction in the likelihood of spitting by virtue of significantly reduced levels of contaminants, in comparison to gold evaporative sources subject to a standard cleaning protocol.
Public/Granted literature
- US20180029096A1 GOLD EVAPORATIVE SOURCES WITH REDUCED CONTAMINANTS AND METHODS FOR MAKING THE SAME Public/Granted day:2018-02-01
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