• Patent Title: Frequency tuning of a RF-generator within a plasma process
  • Application No.: US15532743
    Application Date: 2015-12-03
  • Publication No.: US10032607B2
    Publication Date: 2018-07-24
  • Inventor: Roland Schlierf
  • Applicant: COMET AG
  • Applicant Address: CH
  • Assignee: COMET AG
  • Current Assignee: COMET AG
  • Current Assignee Address: CH
  • Agency: Tarolli, Sundheim, Covell & Tummino LLP
  • Priority: EP14196158 20141203
  • International Application: PCT/EP2015/078571 WO 20151203
  • International Announcement: WO2016/087607 WO 20160609
  • Main IPC: H01J7/24
  • IPC: H01J7/24 H01J37/32
Frequency tuning of a RF-generator within a plasma process
Abstract:
A method of frequency tuning an electrical generator for supplying electrical power to a plasma is provided. Also provided is a plasma processing system and a computer program product. The method, the electrical generator, the plasma processing system, and the computer program product may have the advantage that the stability of the plasma with respect to repeated and essentially identical high and low power pulses is used to reduce the controlling effort and to check the stability of the plasma process.
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