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1.发明公开公开(公告)号：US20240296270A1
公开(公告)日：2024-09-05
申请号：US18574831
申请日：2022-06-24
Applicant: COMET AG
Inventor： Nikolai Schwerg , Roland Schlierf , André Grede , Daniel Gruner , Anton Labanc , Thomas Fink , Manuel vor dem Brocke
IPC: G06F30/34 , G06F30/27 , G06F30/373
CPC classification number: G06F30/34 , G06F30/27 , G06F30/373
Abstract: A method for improving digital signal processing in a radio-frequency system, in particular a radio-frequency power delivery system, including providing at least one input signal, preferably related to a radio-frequency signal of the radio-frequency system, performing a processing procedure wherein the at least one input signal is repeatedly processed by a programmable circuit using at least one configurable parameter of the processing, wherein a configuration of the at least one parameter is varied for each processing of the at least one input signal to obtain respective processing results, determining at least one parameter result for an optimization of the configuration based on the processing results, and providing the at least one determined parameter result for the improved digital signal processing.
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2.发明申请公开(公告)号：US20220190835A1
公开(公告)日：2022-06-16
申请号：US17686665
申请日：2022-03-04
Applicant: Comet AG
Inventor： Manuel vor dem Brocke , Roland Schlierf , André Grede , Daniel Gruner
Abstract: A device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).
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公开(公告)号：US20210027989A1
公开(公告)日：2021-01-28
申请号：US16936865
申请日：2020-07-23
Applicant: Comet AG
Inventor： Manuel vor dem Brocke , Roland Schlierf
Abstract: The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.
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4.发明授权公开(公告)号：US11777508B2
公开(公告)日：2023-10-03
申请号：US17686665
申请日：2022-03-04
Applicant: Comet AG
Inventor： Manuel vor dem Brocke , Roland Schlierf , André Grede , Daniel Gruner
CPC classification number: H03L7/0992 , H03L7/093 , H03L7/189
Abstract: A device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).
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5.发明授权公开(公告)号：US11489531B2
公开(公告)日：2022-11-01
申请号：US16904629
申请日：2020-06-18
Applicant: Comet AG
Inventor： Manuel vor dem Brocke , Roland Schlierf , André Grede , Daniel Gruner
Abstract: The invention relates to a device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).
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Patent Agency Ranking
公开(公告)号：US20220216838A1
公开(公告)日：2022-07-07
申请号：US17611224
申请日：2020-05-22
Applicant: COMET AG
Inventor： Daniel Gruner , André Grede , Nikolai Schwerg , Anton Labanc , Manuel vor dem Brocke , Roland Schlierf
Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.
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公开(公告)号：US10032607B2
公开(公告)日：2018-07-24
申请号：US15532743
申请日：2015-12-03
Applicant: COMET AG
Inventor： Roland Schlierf
Abstract: A method of frequency tuning an electrical generator for supplying electrical power to a plasma is provided. Also provided is a plasma processing system and a computer program product. The method, the electrical generator, the plasma processing system, and the computer program product may have the advantage that the stability of the plasma with respect to repeated and essentially identical high and low power pulses is used to reduce the controlling effort and to check the stability of the plasma process.
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公开(公告)号：US12206372B2
公开(公告)日：2025-01-21
申请号：US17611224
申请日：2020-05-22
Applicant: COMET AG
Inventor： Daniel Gruner , André Grede , Nikolai Schwerg , Anton Labanc , Manuel vor dem Brocke , Roland Schlierf
Abstract: A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.
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9.发明公开公开(公告)号：US20240355598A1
公开(公告)日：2024-10-24
申请号：US18574792
申请日：2022-07-04
Applicant: COMET AG
Inventor： Thomas Fink , André Grede , Daniel Gruner , Anton Labanc , Roland Schlierf , Nikolai Schwerg , Manuel vor dem Brocke
IPC: H01J37/32
CPC classification number: H01J37/32926 , H01J37/32944
Abstract: A method for machine learning a detection of at least one irregularity in a plasma system, particularly an RF powered plasma processing system, including providing at least one input signal each related to an analog signal of a power delivery system for the plasma system and/or to another characteristic of the power delivery system and/or of the plasma system. The at least one input signal having at least one irregularity feature indicative of the irregularity in the plasma system, performing a machine learning procedure wherein the at least one input signal having the at least one irregularity feature is processed by a programmable circuit to train the detection of the irregularity in the plasma system.
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公开(公告)号：US12126347B2
公开(公告)日：2024-10-22
申请号：US18018952
申请日：2021-08-03
Applicant: COMET AG
Inventor： Manuel vor dem Brocke , Roland Schlierf , André Grede , Daniel Gruner , Anton Labanc
Abstract: A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i) each having a respective output frequency (fi), phase (Φi), and amplitude (Ai), including
a signal comparator configured to compare a reference signal having a reference frequency (fref) and a reference phase (Φref) with a feedback signal having a feedback frequency (fPLL) and a feedback phase (ΦPLL), and configured to generate an error signal representative of a difference between the reference signal and the feedback signal; and
a data processing unit receiving as an input signal the error signal generated by the signal comparator, and outputting a plurality of waveform tuning signals (FTWPLL, FTWi) as a function of the error signal;
wherein a plurality of waveform generators (DDSPLL, DDSi) each receiving at least one of the plurality of waveform tuning signals (FTWPLL, FTWi) output by the data processing unit, wherein each waveform generator (DDSPLL, DDSi) generates a time-dependent amplitude signal (APLL(t), Ai(t)) as a function of the received respective waveform tuning signal (FTWPLL, FTWi),
wherein one predetermined amplitude signal (APLL(t)) of the generated plurality of amplitude signals (APLL(t), Ai(t)) represents the feedback signal input to the signal comparator, and the other amplitude signals (Ai(t)) represent the respective radio frequency (RF) output signals (RFout,i) to be generated, and
wherein the data processing unit is configured to adjust both the waveform tuning signal (FTWPLL) corresponding to the one predetermined amplitude signal (APLL(t)) representing the feedback signal such as to minimize the error signal, and the other waveform tuning signals (FTWi) corresponding to the other amplitude signals (Ai(t)) representing the radio frequency (RF) output signals (RFout,i) based on the adjusted waveform tuning signal (FTWPLL) of the predetermined amplitude signal (APLL(t)) representing the feedback signal.
The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RFout,i).
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