Invention Grant
- Patent Title: MEMS actuator package architecture
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Application No.: US15412679Application Date: 2017-01-23
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Publication No.: US10033303B2Publication Date: 2018-07-24
- Inventor: Xiaolei Liu , Guiqin Wang , Matthew Ng
- Applicant: MEMS Drive, Inc.
- Applicant Address: US CA Pasadena
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Pasadena
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: H01L41/09
- IPC: H01L41/09 ; H02N1/00 ; H02N2/02 ; B81B3/00 ; B81B7/00 ; B81B7/02

Abstract:
A package for moving a platform in six degrees of freedom, is provided. The platform may include an optoelectronic device mounted thereon. The package includes an in-plane actuator which may be a MEMS actuator and an out-of-plane actuator which may be formed of a piezoelectric element. The in-plane MEMS actuator may be mounted on the out-of-plane actuator mounted on a recess in a PCB. The in-plane MEMS actuator includes a plurality comb structures in which fingers of opposed combs overlap one another, i.e. extend past each other's ends. The out-of-plane actuator includes a central portion and a plurality of surrounding stages that are connected to the central portion. The in-plane MEMS actuator is coupled to the out-of-plane Z actuator to provide three degrees of freedom to the payload which may be an optoelectronic device included in the package.
Public/Granted literature
- US20170133951A1 MEMS ACTUATOR PACKAGE ARCHITECTURE Public/Granted day:2017-05-11
Information query
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