Invention Grant
- Patent Title: Estimating a gain relationship of an optical source
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Application No.: US15262452Application Date: 2016-09-12
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Publication No.: US10036963B2Publication Date: 2018-07-31
- Inventor: Tanuj Aggarwal
- Applicant: Cymer, LLC
- Applicant Address: US CA San Diego
- Assignee: Cymer, LLC
- Current Assignee: Cymer, LLC
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino McGovern IP Group LLC
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20

Abstract:
An indication of an output of an optical source of a photolithography system is accessed; an indication of an input provided to the optical source is accessed, the provided input being associated with the accessed indication of the output of the optical source; an output error is determined from an expected amount of output and the accessed indication of the output of the optical source; a local gain associated with the accessed indication of the input provided to the optical source is estimated; a gain error is determined from the estimated local gain and an expected local gain; a current value of one or more operating metrics of the optical source is estimated based on one or more of the output error and the gain error; and a gain relationship for the optical source is updated based on the estimated current value of the one or more operating metrics.
Public/Granted literature
- US20180074412A1 ESTIMATING A GAIN RELATIONSHIP OF AN OPTICAL SOURCE Public/Granted day:2018-03-15
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