Invention Grant
- Patent Title: Apparatus and method of manufacturing display apparatus
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Application No.: US14793562Application Date: 2015-07-07
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Publication No.: US10041173B2Publication Date: 2018-08-07
- Inventor: Myungsoo Huh , Dongkyun Ko , Choelmin Jang , Sungchul Kim , Inkyo Kim , Cheollae Roh
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2014-0134487 20141006
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/54 ; H01J37/32 ; C23C16/455 ; H01L51/52

Abstract:
An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.
Public/Granted literature
- US20160097124A1 APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS Public/Granted day:2016-04-07
Information query
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