Invention Grant
- Patent Title: Electrodeposition systems and methods that minimize anode and/or plating solution degradation
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Application No.: US15482938Application Date: 2017-04-10
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Publication No.: US10041183B2Publication Date: 2018-08-07
- Inventor: Charles L. Arvin , Harry D. Cox , Eric D. Perfecto
- Applicant: GlobalFoundries Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Yuanmin Cai, Esq.
- Main IPC: C25D21/12
- IPC: C25D21/12 ; C25D5/18 ; C25D17/10

Abstract:
Disclosed are electrodeposition systems and methods wherein at least three electrodes are placed in a container containing a plating solution. The electrodes are connected to a polarity-switching unit and include a first electrode, a second electrode and a third electrode. The polarity-switching unit establishes a constant polarity state between the first and second electrodes in the solution during an active plating mode, wherein the first electrode has a negative polarity and the second electrode has a positive polarity, thereby allowing a plated layer to form on a workpiece at the first electrode. The polarity-switching unit further establishes an oscillating polarity state between the second and third electrodes during a non-plating mode (i.e., when the first electrode is removed from the plating solution), wherein the second electrode and the third electrode have opposite polarities that switch at regular, relatively fast, intervals, thereby limiting degradation of the second electrode and/or the plating solution.
Public/Granted literature
- US20170211199A1 ELECTRODEPOSITION SYSTEMS AND METHODS THAT MINIMIZE ANODE AND/OR PLATING SOLUTION DEGRADATION Public/Granted day:2017-07-27
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