Invention Grant
- Patent Title: Integrated emissivity sensor alignment characterization
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Application No.: US15281757Application Date: 2016-09-30
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Publication No.: US10041789B2Publication Date: 2018-08-07
- Inventor: John F. Baggett , Joseph Ferrara
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: G01B11/27
- IPC: G01B11/27 ; G01N21/59 ; G01N21/84 ; H01L21/68

Abstract:
A workpiece alignment system has a workpiece support to support a workpiece. A first light emitter directs a first light beam toward the workpiece. A first light receiver receives the first light beam. A rotation device rotates the workpiece support about a support axis. A second light emitter directs a second light beam toward a peripheral region of the workpiece. A second light receiver receives the second light beam concurrent with the rotation of the workpiece. A controller determines a transmissivity of the workpiece based on a total initial emittance of the first light beam a transmission of the first light beam through the workpiece. The controller determines a position of the workpiece with respect to the support axis based, at least in part, on a rotational position of the workpiece, a portion of the second light beam received, and the determined transmissivity.
Public/Granted literature
- US20180094921A1 INTEGRATED EMISSIVITY SENSOR ALIGNMENT CHARACTERIZATION Public/Granted day:2018-04-05
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