Invention Grant
- Patent Title: Pressure sensor device for measuring a differential normal pressure to the device and related methods
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Application No.: US15644301Application Date: 2017-07-07
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Publication No.: US10041848B2Publication Date: 2018-08-07
- Inventor: Alessandro Motta , Alberto Pagani , Giovanni Sicurella
- Applicant: STMicroelectronics S.r.I.
- Applicant Address: IT Agrate Brianza (MB)
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza (MB)
- Agency: Slater Matsil, LLP
- Main IPC: G01L9/06
- IPC: G01L9/06 ; G01L1/18 ; G01L9/00

Abstract:
A pressure sensor device is to be positioned within a material where a mechanical parameter is measured. The pressure sensor device may include an IC having a ring oscillator with an inverter stage having first doped and second doped piezoresistor couples. Each piezoresistor couple may include two piezoresistors arranged orthogonal to one another with a same resistance value. Each piezoresistor couple may have first and second resistance values responsive to pressure. The IC may include an output interface coupled to the ring oscillator and configured to generate a pressure output signal based upon the first and second resistance values and indicative of pressure normal to the IC.
Public/Granted literature
- US20170307456A1 PRESSURE SENSOR DEVICE FOR MEASURING A DIFFERENTIAL NORMAL PRESSURE TO THE DEVICE AND RELATED METHODS Public/Granted day:2017-10-26
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