Invention Grant
- Patent Title: Thermoelectric cooling using through-silicon vias
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Application No.: US15147595Application Date: 2016-05-05
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Publication No.: US10043962B2Publication Date: 2018-08-07
- Inventor: Sudeep Mandal , Richard S. Graf
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L35/30
- IPC: H01L35/30 ; H01L35/32 ; H01L35/10 ; H01L23/38 ; H01L35/34

Abstract:
Structures that include thermoelectric couples and methods for fabricating such structures. A device level and a back-end-of-line (BEOL) interconnect structure are fabricated at a front side of a substrate. A thermoelectric couple is formed that is coupled with the substrate. The thermoelectric couple includes a first through-silicon via extending through the device level and the substrate to a back side of the substrate, a second through-silicon via extending through the device level and the substrate to the back side of the substrate, an n-type thermoelectric pillar coupled with the first through-silicon via, and a p-type thermoelectric pillar coupled with the second through-silicon via. The BEOL interconnect structure includes a wire that couples the first through-silicon via in series with the second through-silicon via.
Public/Granted literature
- US20170324015A1 THERMOELECTRIC COOLING USING THROUGH-SILICON VIAS Public/Granted day:2017-11-09
Information query
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