Invention Grant
- Patent Title: Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms
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Application No.: US15239268Application Date: 2016-08-17
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Publication No.: US10044164B2Publication Date: 2018-08-07
- Inventor: Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng , John Fielden
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H01S3/00 ; H01S3/08 ; H01S3/083

Abstract:
A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
Public/Granted literature
- US20160359292A1 Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/or Prisms Public/Granted day:2016-12-08
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