发明授权
- 专利标题： Cerium oxide abrasive, method for producing cerium oxide abrasive, and polishing method
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申请号： US14901229申请日： 2014-06-18
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公开(公告)号： US10047262B2公开(公告)日： 2018-08-14
- 发明人: Keisuke Mizoguchi , Akihiro Maezawa , Atsushi Takahashi , Natsuki Ito , Natsumi Hirayama , Hideaki Wakamatsu
- 申请人： Konica Minolta, Inc.
- 申请人地址： JP Tokyo
- 专利权人： Konica Minolta, Inc.
- 当前专利权人： Konica Minolta, Inc.
- 当前专利权人地址： JP Tokyo
- 代理机构： Cozen O'Connor
- 优先权： JP2013-134687 20130627; JP2013-166051 20130809; JP2013-187903 20130911
- 国际申请： PCT/JP2014/066143 WO 20140618
- 国际公布： WO2014/208414 WO 20141231
- 主分类号： B24B37/04
- IPC分类号： B24B37/04 ; C09K3/14 ; C01F17/00
摘要：
An object of the present invention is to provide a cerium oxide abrasive material containing cerium oxide abrasive particles prepared by a synthetic method using an aqueous solution of a salt of a rare earth element and a precipitant, the cerium oxide abrasive particles having a spherical shape and high polishing performance (polishing rate and polishing precision of the polished surface), a method for producing the cerium oxide abrasive material, and a polishing method. The cerium oxide abrasive material according to the present invention comprises spherical cerium oxide abrasive particles prepared by a synthetic method using an aqueous solution of a salt of a rare earth element and a precipitant, wherein the cerium oxide abrasive particles have a spherical shape having an average aspect ratio within the range of 1.00 to 1.15.