- 专利标题: Pump assembly and method for evacuating a vapor-filled chamber
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申请号: US14762005申请日: 2014-01-16
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公开(公告)号: US10047747B2公开(公告)日: 2018-08-14
- 发明人: Heiner Kösters , Matthias Tamm , Daniel Schütze
- 申请人: Sterling Industry Consult GmbH
- 申请人地址: DE Itzehoe
- 专利权人: Sterling Industry Consult GmbH
- 当前专利权人: Sterling Industry Consult GmbH
- 当前专利权人地址: DE Itzehoe
- 代理机构: Alix, Yale & Ristas, LLP
- 优先权: EP13152022 20130121
- 国际申请: PCT/EP2014/050807 WO 20140116
- 国际公布: WO2014/111471 WO 20140724
- 主分类号: F04C19/00
- IPC分类号: F04C19/00 ; F04C29/04 ; F04C23/00 ; F04C25/02 ; F04C28/10
摘要:
The invention relates to an assembly comprising a vacuum pump and a chamber, wherein a suction tract extends between the chamber and the vacuum pump. The vacuum pump is a liquid ring machine. According to the invention, a liquid outlet is arranged in the suction tract in order to add liquid to gas sucked in from the chamber. The invention further relates to a method for evacuating a chamber filled with vapor. According to the invention, the vapor is condensed by introducing additional liquid into the suction tract, thus by co-condensation. By supplying liquid selectively only when liquid is required for the condensation of the vapor, water is saved.
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