A process fluid pressure transmitter is provided. The process fluid pressure transmitter includes a pressure sensor having an electrical characteristic that changes in response to a deformation of the pressure sensor in response to pressure. Measurement circuitry is coupled to the pressure sensor and is configured to provide an indication of the electrical characteristic. An isolation diaphragm is configured to contact the process fluid and deform in response to process fluid pressure. A substantially incompressible fill fluid fluidically couples the isolation diaphragm to the pressure sensor. An overpressure compliant structure is coupled to the fill fluid and is configured to be substantially rigid at pressures below a selected threshold, but to deform in response to pressure above the selected threshold.