- 专利标题: Magnetic detection device and method of manufacturing same
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申请号: US15305864申请日: 2015-03-12
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公开(公告)号: US10048329B2公开(公告)日: 2018-08-14
- 发明人: Michiharu Yamamoto , Tomohiko Nagao
- 申请人: AICHI STEEL CORPORATION
- 申请人地址: JP Tokai-shi, Aichi-ken
- 专利权人: AICHI STEEL CORPORATION
- 当前专利权人: AICHI STEEL CORPORATION
- 当前专利权人地址: JP Tokai-shi, Aichi-ken
- 代理机构: Sughrue Mion, PLLC
- 优先权: JP2014-097251 20140509
- 国际申请: PCT/JP2015/057237 WO 20150312
- 国际公布: WO2015/170509 WO 20151112
- 主分类号: G01R33/02
- IPC分类号: G01R33/02 ; G01R33/06 ; G01C17/30 ; H01L43/02 ; H01L43/12 ; H01L27/22 ; G01R33/00
摘要:
A reduced size/thickness magnetic detection device includes: a substrate; and a magneto-impedance element at one substrate surface side and including a magneto-sensitive wire and a detection coil. The wire senses an external magnetic field component in a first axis direction in which the wire extends. The coil loops around the wire, and includes left-side and right-side coil parts coexisting along the wire, and a magnetic field direction changing body of soft magnetic material having at least a part at another substrate surface side or in the substrate above an intermediate position between left-side and right-side coil parts. The body can change an external magnetic field component in a third axis direction intersecting the substrate to a measurement magnetic field component in the first axis direction. The external magnetic field component in the third axis direction can be detected from a left-side coil part output and a right-side coil part output.
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