Invention Grant
- Patent Title: Micromirror
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Application No.: US14364991Application Date: 2012-10-23
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Publication No.: US10048487B2Publication Date: 2018-08-14
- Inventor: Heiko Nitsche , Frederic Njikam Njimonzie , Wolfram Schock , Joerg Muchow , Helmut Grutzeck , Zoltan Lestyan
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102011089514 20111222
- International Application: PCT/EP2012/070925 WO 20121023
- International Announcement: WO2013/091939 WO 20130627
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B7/182 ; G02B26/10 ; B81B3/00

Abstract:
A micromirror including a first layer having a first main extension plane, and a second layer having a second main extension plane, the first main extension plane and the second main extension plane being situated parallel to one another, the first layer and the second layer being sectionally connected to one another via at least one connection area, at least one spring element being implemented in the first layer, a movably suspended mirror plate being implemented in the second layer, the mirror plate having a mirror surface on a first side parallel to the main extension plane and being connected on an opposing second side via the connection area to an anchor of the spring element, a part of the spring element on the second side of the mirror plate being movably situated in relation to the mirror plate. A two-mirror system having such a micromirror is also provided.
Public/Granted literature
- US20150036203A1 MICROMIRROR Public/Granted day:2015-02-05
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