Invention Grant
- Patent Title: Catadioptric illumination system for metrology
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Application No.: US14592755Application Date: 2015-01-08
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Publication No.: US10048591B2Publication Date: 2018-08-14
- Inventor: Stanislav Y. Smirnov , Yevgeniy Konstantinovich Shmarev
- Applicant: ASML HOLDING N.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML HOLDING N.V.
- Current Assignee: ASML HOLDING N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G01N22/00
- IPC: G01N22/00 ; G03F7/20 ; G01N21/47 ; G01N21/95 ; G01N21/956 ; G02B21/00 ; G02B21/04 ; G02B17/08

Abstract:
A catadioptric optical system operates in a wide spectral range. In an embodiment, the catadioptric optical system includes a first reflective surface positioned and configured to reflect radiation; a second reflective surface positioned and configured to reflect radiation reflected from the first reflective surface as a collimated beam, the second reflective surface having an aperture to allow transmission of radiation through the second reflective surface; and a channel structure extending from the aperture toward the first reflective surface and having an outlet, between the first reflective surface and the second reflective surface, to supply radiation to the first reflective surface.
Public/Granted literature
- US20150116719A1 CATADIOPTRIC ILLUMINATION SYSTEM FOR METROLOGY Public/Granted day:2015-04-30
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