Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus and method for generating extreme ultraviolet light
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Application No.: US15480190Application Date: 2017-04-05
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Publication No.: US10054861B2Publication Date: 2018-08-21
- Inventor: Takayuki Yabu
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03F7/20

Abstract:
An extreme ultraviolet light generating apparatus may include: a chamber, in which extreme ultraviolet light is generated; a target supply unit that outputs a target into the chamber as droplets to supply the target to a plasma generating region; a stage that moves the target supply unit in a direction substantially perpendicular to the trajectory of droplets output from the target supply unit; a droplet detector provided between the target supply unit and the plasma generating region at an inclination of a predetermined angle with respect to a substantially vertical direction, that detects the droplets from a direction inclined at the predetermined angle; and a calculation control unit that controls the irradiation timings of the laser beam at which the laser beam is irradiated onto the droplets within the plasm generating region, by adding delay times to the timings at which the droplets are detected by the droplet detector.
Public/Granted literature
- US20170205713A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT Public/Granted day:2017-07-20
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