Invention Grant
- Patent Title: Measuring probe with attenuating device for measuring the thickness of thin films
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Application No.: US14786218Application Date: 2014-04-24
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Publication No.: US10060718B2Publication Date: 2018-08-28
- Inventor: Werner Volz
- Applicant: Helmut Fischer GmbH Institut fur Elektronik und Messtechnik
- Applicant Address: DE Sindelfingen
- Assignee: Helmut Fischer GmbH Institut für Elecktronik und Messtechnik
- Current Assignee: Helmut Fischer GmbH Institut für Elecktronik und Messtechnik
- Current Assignee Address: DE Sindelfingen
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: DE102013104251 20130426
- International Application: PCT/EP2014/058367 WO 20140424
- International Announcement: WO2014/174025 WO 20141030
- Main IPC: G01B7/06
- IPC: G01B7/06 ; G01D11/10

Abstract:
A measuring probe for the measurement of the thickness of thin layers, includes a housing, at least one sensor element which is mounted with at least one spring element to be flexible with respect to the housing, the sensor element having a spherical positioning cap pointing towards the measuring surface of an object of measurement against a touchdown direction and along a longitudinal axis thereof, and an attenuating device on the housing which acts in the touchdown direction of the at least one sensor element before the sensor element is fitted onto the measuring surface of the object of measurement and attenuates the touchdown movement of the at least one sensor element in the direction of the measuring surface of the object of measurement.
Public/Granted literature
- US20160076871A1 MEASURING PROBE FOR MEASURING THE THICKNESS OF THIN FILMS Public/Granted day:2016-03-17
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